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Registered Member #2123
Joined: Sat May 16 2009, 03:10AM
Location: Bend, Oregon
Posts: 312
Cantilever.
Conductive films are deposited on dielectrics, the films are patterned as circuits (wheatstone bridge etc.) using dry plasma etch processing, the dielectric is then removed using wet etch processing leaving the patterned conductors 'in the air' free to deflect with acceleration.
Registered Member #65
Joined: Thu Feb 09 2006, 06:43AM
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Posts: 1155
There are several types of sensors that each have there own issues. MEMs devices: * typically electrostatics drive an oscillating mass on a spring * mechanical deflection types are also used * Costing less than $6 these are the most common
Gas temperature based accelerometers are usually for high end instrumentation
Optical accelerometers
Piezoelectric accelerometers * very problematic technology, but they are still used for car alarms
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Question, How to make the Z axis accelerometer on a wafer?
