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Registered Member #1451
Joined: Wed Apr 23 2008, 03:48AM
Location: Boulder, Co
Posts: 661
Does anyone know of a cite that has info on plasma physics, mainly Capacitively Coupled Plasmas? Google only turns up pages about plasma sputtering or film deposition and things like that. I want to learn about the movement of the particles in the plasma, not it's aplication.
More specifically, I need to learn the ion movement in a plasma created between two concentric electrodes with a high DC potential and the inner ring being the cathode (negative), outer the anode (positive). I assume in that configuration that the particles would become ionized at the anode and be accelerated toward the inner electrode while the electrons would stay at the anode. Is this correct? I also would like to learn what would go on if the high voltage was AC, high and low frequency.
Account deactivated by user request on 6/11/2009. Registered Member #1071
Joined: Fri Oct 19 2007, 02:13AM
Location:
Posts: 44
The Lieberman and Lichtenberg book is a good reference for basic discharge physics. I dont know of any website though, sorry.
As far as the behavior of the ions and electrons near an electrode, that area is called the sheath, there should be reference online about plasma sheaths.
Registered Member #1739
Joined: Fri Oct 03 2008, 10:05AM
Location: Moscow, Russia
Posts: 261
Well, what you are looking for is described in papers regarding capacitive coupling a bit, but mainly this is all about the hollow cathode effect. Regarding the sheeth areas, in pure capacitive discharge they behave as capacitors, with extreme electron energies obtained there. I tried that in the lab while doing my diploma work with parallel flat electrodes, with a higher pressure when the sheeths are most pronounced the particles could easily rip off the top layer of an internal electrode, obviousely with a longer exposure time it would desintegrate the electrode completely - this is used for plasma etching by the way.
Registered Member #230
Joined: Tue Feb 21 2006, 08:01PM
Location: Gracefield lower Hutt
Posts: 284
Try and look under their ion gun design section. A similar gun to what you are describing (anode layer source)has been described recently with constructional details. As for ion movement I use SIMION 7 to model ion optics before building as building takes much money, and time getting it right the first time is much more rewarding
Registered Member #1451
Joined: Wed Apr 23 2008, 03:48AM
Location: Boulder, Co
Posts: 661
Thanks John. The anode layer ion gun is basically exactly my configuration. As for the SIMION 7, do you know of any tutorials that are out there?
EDIT- sorry I found the tutorial link on the site... Also read more about anode layer ion guns and it's not the exact configuration I have, but similar.
Do you know about how much voltage would be needed to ionize a gas at around 500 microns if the distance between the electrodes is 11cm? I used a flyback transformer previously but when the plasma was being created I measured the voltage at only 800V. Does this sound about right?
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Plasma Physics
