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Registered Member #1792
Joined: Fri Oct 31 2008, 08:12PM
Location: University of California
Posts: 527
wrote ... once it's done a mask is applied and the cantilever are etch free from each other ...
That's the trick isn't it :) My main point is that it will be somewhat tricky to free the cantilevers, it's much easier if you have RIE and CMP steps available like your source.
wrote ... the only limitation is that it's difficult to sputter something witch is not conductive.
You could also look into e-beam evaporation which works well for SiN, SiO2, and basically any metal.
Registered Member #2941
Joined: Fri Jun 25 2010, 08:08AM
Location:
Posts: 143
Pinky's Brain wrote ...
I was mistaken any way ... they can make the antennas alright, they still have trouble with the MIM diodes.
that's an interesting approach ,but even it the MIM where working correctly ,one would still need to cool down the array to isolate it from thermal noise..
I read a paper some time effect about cantum tunneling for thermal imaging ,and it seem very promising ,but the sensor did had to be cooled
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a low cost thermal imager...
