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Need help with building or purchasing an HV power supply

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ny11212

Thu Apr 21 2011, 07:52PM

Registered Member #3839 Joined: Tue Apr 19 2011, 07:00PM
Location:
Posts: 8

Ok, if it helps, I just got some more specs:

Supply voltage
110 to 120 VAC

Supply frequency
50 to 60 Hz

Supply current
2A

Output frequency
50 to 3500 Hz

Output Pulse width
1 to 10Î¼s

Output HV
10 to 30 kV Depending on load

James

Thu Apr 21 2011, 07:59PM

Registered Member #3610 Joined: Thu Jan 13 2011, 03:29AM
Location: Seattle, WA
Posts: 506

That's still rather vague. What is the required average output power? Do the pulses have to be exactly 2A, max of 2A, or min of 2A? Are you saying that it's acceptable for the output to sag from 30kV to 20kV when under heavy load?

ny11212

Thu Apr 21 2011, 08:02PM

Registered Member #3839 Joined: Tue Apr 19 2011, 07:00PM
Location:
Posts: 8

I guess posting half the information needed, and then getting frustrated made me sound unstable.

I'm not unstable, I'm completely serious. It is a high voltage power supply, but its being used to power a plasma etching machine. I guess it's low power, to avoid thermal burning of the material to be etched.

Unfortunately, I'm not an electrical expert, so any help with determining the specs would be appreciated.

Please PM me if you know of a manufactured supply that I could purchase.

ny11212

Thu Apr 21 2011, 08:03PM

Registered Member #3839 Joined: Tue Apr 19 2011, 07:00PM
Location:
Posts: 8

@James
I'm not sure, but I'll see if I can get an answer

Ash Small

Thu Apr 21 2011, 08:45PM

Registered Member #3414 Joined: Sun Nov 14 2010, 05:05PM
Location: UK
Posts: 4245

James, we think the 2A figure is input power, not output power. The 'pulses' won't necessarily be 2A, but the average current draw (from the mains) will be in that region, although there is still some confusion.

Most of the power supplies I've seen tend to be 3 phase and several kW, but some are smaller.

The reason for the short pulses 'may' be in order to allow the 'etched' material to disperse, but we can only guess.

teravolt

Fri Apr 22 2011, 02:28AM

Registered Member #195 Joined: Fri Feb 17 2006, 08:27PM
Location: Berkeley, ca.
Posts: 1111

how many amps do you expect to see at the load? what is the load impedance?

You could do a modulator but with only 2A in each pulse will only be in the 1 or 2 ma range. Are you flexible in your pulse width or pulse rate

Pinky's Brain

Fri Apr 22 2011, 03:13AM

Registered Member #2901 Joined: Thu Jun 03 2010, 01:25PM
Location:
Posts: 837

It really depends on what the load current has to be.

A single IGBT pulse generator and pulse transformer might be enough.

Arcstarter

Fri Apr 22 2011, 03:39AM

Registered Member #1225 Joined: Sat Jan 12 2008, 01:24AM
Location: Beaumont, Texas, USA
Posts: 2253

Now that you have clarified that you meant 2a input, it will be much easier to find what you are looking for.

You could probably do what you want with a car ignition coil and some IC and a mosfet. So in other words, it seems like it could be done very cheaply. A car ignition coil can easily output 10-30kv, 50-3500hz sounds pretty close to the range that an ignition coil likes, and even if the output of the ignition coil was too high with 120v input, a transformer could be used.

Somebody from the forum may be able to make such a thing, but the problem is that we would indeed need to know every detail before we could help.

Ash Small

Fri Apr 22 2011, 08:13AM

Registered Member #3414 Joined: Sun Nov 14 2010, 05:05PM
Location: UK
Posts: 4245

These systems are usually computer controlled, (external PC with 'onboard' mudule) with all paramaters, eg MKS pressure control system, turbo and backing pumps, gas flow rates, RF/auto-matching unit,and, with this power supply, voltage, pulse duration and frequency all controlled from the same keyboard/screen.

This is something that probably needs to be considered when designing a power supply. Maybe you could clarify this, ny11212?

EDIT: forgot to mention water cooling for RF coil, etc, (pumps, flowmeters, temperature sensors.) Some have heated tables for substrates (as high as 800 C in some cases. I've probably missed out a few other things as well, but again it depends on the application)

If you're wondering how the heat is transferred from the table to the substrate in a vacuum (or reduced pressure), they pump helium in between table and substrate.

Pinky's Brain

Fri Apr 22 2011, 08:12PM

Registered Member #2901 Joined: Thu Jun 03 2010, 01:25PM
Location:
Posts: 837

<<1 us rise times is not exactly what flyback ignition coils are designed for.

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