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I did more tests with titanium today. While the deposition is not particularly great looking(still it looks metallic, not a compound) I can confirm a very strong pumping effect.
With the mechanical pump off, the pressure drops like crazy. I got from (what my meter claims to be) 30 microns to 10 microns in a matter of seconds, that is faster then with the mechanical pump.
I'm going to try a titanium filament getter soon, that is, as soon as the post gets me what I need.
Titanium getters are supposed to work a much lower pressures, but, nothing stops them from working at high pressure, you are just supposed to get very short lifetime on the filaments, and I don't really care, titanium wire is cheap.
I am still missing a sub micron gauge....but if this works it will be a interesting replacement for more complex pumps, like diffusion or turbo-molecular.
Not to mention it will have very short on/off times
About the nitrides, if I sputter at low rates, I do get a gold/yellow deposit but on everything except the glass slides I was testing At higher rates, I get a gray/white metallic deposit.
And, another interesting effect, the V/I is extremely non linear As I increased the current, V first goes up, then down, then up again.
For copper or silver it's more or less linear, I goes up, so does V.
If you want to see the new chamber or how the magnetron looks I have a couple of videos on my YouTube page.
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Inert metals? / PVD process
