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Registered Member #2261
Joined: Mon Aug 03 2009, 01:19AM
Location: London, UK
Posts: 581
Unusual looking chip. They usually have the connection pads around the edge.
Differential Interference Contrast illumination seems to be the best if this site is anything to go by - you can select 3 different views by clicking text in the second paragraph below the image
Registered Member #1062
Joined: Tue Oct 16 2007, 02:01AM
Location:
Posts: 1529
DIC is commonly used for biological, but its great for SiC too. (its from a growth and characterization lab). If anyone wants to send me chips (w/ die exposed), I can image them.
I think the circle radius in the highest magnification(I didn't post one) is 83um.
Registered Member #480
Joined: Thu Jul 06 2006, 07:08PM
Location: North America
Posts: 644
Intrawinding wrote:
"Differential Interference Contrast illumination seems to be the best if this site is anything to go by - you can select 3 different views by clicking text in the second paragraph below the image
I'm not sure I agree. Unfortunately, all three images are not shown at the same magnification, so it's hard to compare the rendering of small details in the DIC image. Nevertheless, if you look closely at the details of the ties in the tracks, the sharpness of the edges of the ties appears to be much better in the dark-field image.
Registered Member #1062
Joined: Tue Oct 16 2007, 02:01AM
Location:
Posts: 1529
I think it is a close tie between the two, wish I had a dark field microscope to compare. Here are two more I took today (They are rotated 180 degrees). The radius is 415um (I think). The only difference is that one has the polarizing filters removed, so it is like a normal top illuminated microscope. I also adjusted the brightness to compensate for the light the filters block.
Thiss is from a 2" quarter wafer, and a particulary bad one (usually less steps, notice how bad the numbers are).
Registered Member #2261
Joined: Mon Aug 03 2009, 01:19AM
Location: London, UK
Posts: 581
Herr Zapp wrote ...
Intrawinding wrote:
"Differential Interference Contrast illumination seems to be the best if this site is anything to go by - you can select 3 different views by clicking text in the second paragraph below the image
I'm not sure I agree. Unfortunately, all three images are not shown at the same magnification, so it's hard to compare the rendering of small details in the DIC image. Nevertheless, if you look closely at the details of the ties in the tracks, the sharpness of the edges of the ties appears to be much better in the dark-field image.
Regards, Herr Zapp
I'm assuming these different techniques just affect the difference in colour/contrast between regions on a chip and not resolution.
rp181 wrote ...
I think it is a close tie between the two, wish I had a dark field microscope to compare. Here are two more I took today (They are rotated 180 degrees). The radius is 415um (I think). The only difference is that one has the polarizing filters removed, so it is like a normal top illuminated microscope. I also adjusted the brightness to compensate for the light the filters block.
This is from a 2" quarter wafer, and a particulary bad one (usually less steps, notice how bad the numbers are).
The second shows crystal patterns. Are these the 'steps' you mention? They're invisible in the first image.
Registered Member #1062
Joined: Tue Oct 16 2007, 02:01AM
Location:
Posts: 1529
Yes. When there is a single step, it is a step. When there are multiple in succesion (i.e. bottom left hex) it is a screwed distortion, or a bad mask during deposition.
The color and contrast can be changed with the same controls. Its odd how in the train there is a wide bearth of colors, the thickness difference must be large. I use the orange, I find I can see the imperfections best in that color. You can get a blue, gray, or green, and any transition in between.
The first is with unfiltered light besides minor conditioning, shutters, etc...
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IC die imaging
