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Registered Member #3272
Joined: Mon Oct 04 2010, 11:40PM
Location: Beaverton, OR
Posts: 101
I am putting together an electron beam deposition system for my vacuum chamber. I need a big 10kv dc power supply for the filament bias, the gun I am using is rated up to 1.2 amps emission current, thats 12kw, I would be happy with even 4 to 6 kw (400 to 600ma)
I am trying to build a setup for doing dichroic mirrors and bandpass filters.
Registered Member #2431
Joined: Tue Oct 13 2009, 09:47PM
Location: Chico, CA. USA
Posts: 5639
yikes !!!
Id suggest: 10 paralled automatically load sharing, each 1kw sections. current mode (not voltage mode) feedback. ferrite cored at 100khz or so. power factor corrected, 240 AC rectified input would be a must.
Theres more but ill have to think on it. youll need to read everyone of the TI/Unitrode documents.
Registered Member #3272
Joined: Mon Oct 04 2010, 11:40PM
Location: Beaverton, OR
Posts: 101
Yeah, it is a pain. Old commercial e-beam supplies are 3 phase transformers into a bridge for -10kv and then though a giant triode. Some use magnetic amplifiers to regulate the output current.
Then I need a filament transformer, 6v at 40amps and isolated for that 10kv. I am thinking of a MOT and then winding a secondary from some 8 AWG HV wire, if I can find any.
Some prints of the old tube based supplies here. These things are still incredibly expensive on the used market.
Registered Member #162
Joined: Mon Feb 13 2006, 10:25AM
Location: United Kingdom
Posts: 3140
a few thoughts;
1 where do you expect the 12 kW to be dissipated? ... my expectation is that it will be in the target/glass ... can you cool it adequately?
2 how long would it take to deposit, for example, a 1/4-wavelength thick coating at 1.2A? ... not long I guess !
since deposition rate is proportional to current, you could use a lower current for longer, this would allow a MUCH cheaper power supply and finer control over total charge / deposition thickness.
if this is for hobby / very small scale use then I suggest; single phase ac - variac - NST/OBIT or similar - rectifier(s) .... NO capacitor(s) . the NST/OBIT would provide short circuit / over current protection . the low current output of an NST/OBIT and lack of capacitance / charge storage makes the power supply scarily painful but (generally) non-lethal
Registered Member #311
Joined: Sun Mar 12 2006, 08:28PM
Location:
Posts: 253
Does it matter is it's not smoothed? If not then something crude like a transformer, halfwave rectifier and ballast may do it. But as mentioned, just because it's rated to 1.2A doesn't mean you need (or can) use it at that level. Start off with something quick cheap & easy at a lower current, get it working then decide if you really need isane power.
Registered Member #193
Joined: Fri Feb 17 2006, 07:04AM
Location: sheffield
Posts: 1022
Fast response. Don't try connecting 2 or 3 mots in series. The insulation between the secondary and primary windings isn't built for it. You might getaway with it for a while- or you might get a fire.
Registered Member #42796
Joined: Mon Jan 13 2014, 06:34PM
Location:
Posts: 195
Bored Chemist wrote ...
Fast response. Don't try connecting 2 or 3 mots in series. The insulation between the secondary and primary windings isn't built for it. You might getaway with it for a while- or you might get a fire.
I have 2 coils using multiple MOTs in series and never had an issue (everything is submerged in oil). I don't claim it is a good idea or that the transformers are designed for this, but they seem to work. The longest I have ever run them non stop (two in series) is about 30mins though.
Disclaimer - everyone who tries to do this is on his own risк
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